Ultrasensitive hydrogen detection by electrostatically formed silicon nanowire decorated by palladium nanoparticles

Developing high performance hydrogen (H2) sensors is of utmost importance to facilitate the safe usage H2 as alternative source clean and renewable energy. We present an ultra-sensitive sensor operating in air based on electrostatically formed nanowire (EFN) decorated by palladium nanoparticles (Pd NPs). By appropriate tuning various gate voltages EFN, extremely response ∼2 × 106 % (0.8 exposure) a sensitivity ∼400 ppm−1 obtained at room temperature (20 ± 2 °C). This outperforms, best our knowledge, most reported resistive field effect transistor (FET) sensors. The EFN power consumption varies from few pW ∼436 nW maximum current operation thus enabling ultra-low temperature. In addition, exhibits fast recovery times, retains good sensing performances even 50 relative humidity (RH) reproducibility over time. Combining Pd NPs with unique features platform makes Pd-EFN versatile, robust, low power, rapid, highly sensitive sensor.